Matches in DBpedia 2016-04 for { <http://doi.org/10.1116/1.4816548> ?p ?o }
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- 1.4816548 date "2013-09-01".
- 1.4816548 doi "10.1116/1.4816548".
- 1.4816548 first "Gregory N.".
- 1.4816548 first2 "Jeffrey W.".
- 1.4816548 first3 "Steven M.".
- 1.4816548 first4 "Suvi".
- 1.4816548 first5 "Hyeongtag".
- 1.4816548 first6 "W. M. M.".
- 1.4816548 first7 "Markku".
- 1.4816548 first8 "Paul".
- 1.4816548 first9 "Mikko".
- 1.4816548 isCitedBy Atomic_layer_deposition.
- 1.4816548 issn "0734-2101".
- 1.4816548 issue "5".
- 1.4816548 journal "Journal of Vacuum Science & Technology A".
- 1.4816548 last "Parsons".
- 1.4816548 last2 "Elam".
- 1.4816548 last3 "George".
- 1.4816548 last4 "Haukka".
- 1.4816548 last5 "Jeon".
- 1.4816548 last6 "Kessels".
- 1.4816548 last7 "Leskelä".
- 1.4816548 last8 "Poodt".
- 1.4816548 last9 "Ritala".
- 1.4816548 pages "050818".
- 1.4816548 title "History of atomic layer deposition and its relationship with the American VacuumSociety".
- 1.4816548 url "http://scitation.aip.org/content/avs/journal/jvsta/31/5/10.1116/1.4816548".
- 1.4816548 volume "31".