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- 1.1808732 author "Basu, A. S.".
- 1.1808732 bibcode "2004JVSTB..22.3217B".
- 1.1808732 displayAuthors "etal".
- 1.1808732 doi "10.1116/1.1808732".
- 1.1808732 isCitedBy Scanning_thermal_microscopy.
- 1.1808732 issue "6".
- 1.1808732 journal "Journal of Vacuum Science and Technology B".
- 1.1808732 pages "3217–3220".
- 1.1808732 title "Scanning thermal lithography: Maskless, submicron thermochemical patterning of photoresist by ultracompliant probes".
- 1.1808732 volume "22".
- 1.1808732 year "2004".