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- sensor.2005.1497272 chapter "Milestones in deep reactive ion etching".
- sensor.2005.1497272 doi "10.1109/SENSOR.2005.1497272".
- sensor.2005.1497272 first1 "F.".
- sensor.2005.1497272 first2 "A.".
- sensor.2005.1497272 isCitedBy Microelectromechanical_systems.
- sensor.2005.1497272 isbn "0-7803-8994-8".
- sensor.2005.1497272 last1 "Laermer".
- sensor.2005.1497272 last2 "Urban".
- sensor.2005.1497272 page "1118".
- sensor.2005.1497272 title "The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05".
- sensor.2005.1497272 volume "2".
- sensor.2005.1497272 year "2005".