Matches in DBpedia 2016-04 for { <http://doi.org/10.1109/memsys.1996.493993> ?p ?o }
Showing triples 1 to 8 of
8
with 100 triples per page.
- memsys.1996.493993 author "H. J. Quenzer and C. Dell and B. Wagner".
- memsys.1996.493993 booktitle "Micro Electro Mechanical Systems, 1996 Proceedings. 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems'.".
- memsys.1996.493993 date "February 1996".
- memsys.1996.493993 doi "10.1109/MEMSYS.1996.493993".
- memsys.1996.493993 isCitedBy Anodic_bonding.
- memsys.1996.493993 journal "Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems'.".
- memsys.1996.493993 pages "272–276".
- memsys.1996.493993 title "Silicon-silicon anodic-bonding with intermediate glass layers using spin-on glasses".