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- aim.2014.6878324 accessDate "2015-05-06".
- aim.2014.6878324 chapter "Nanometer control of the markerless overlay process using thermal scanning probe lithography".
- aim.2014.6878324 date "July 2014".
- aim.2014.6878324 doi "10.1109/AIM.2014.6878324".
- aim.2014.6878324 first "C.".
- aim.2014.6878324 first2 "U.".
- aim.2014.6878324 first3 "J.".
- aim.2014.6878324 first4 "D.".
- aim.2014.6878324 first5 "A.".
- aim.2014.6878324 isCitedBy Thermal_scanning_probe_lithography.
- aim.2014.6878324 isbn "978-1-4799-5736-1".
- aim.2014.6878324 last "Rawlings".
- aim.2014.6878324 last2 "Duerig".
- aim.2014.6878324 last3 "Hedrick".
- aim.2014.6878324 last4 "Coady".
- aim.2014.6878324 last5 "Knoll".
- aim.2014.6878324 pages "1670–1675".
- aim.2014.6878324 title "2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics".
- aim.2014.6878324 url "http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=6878324".