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- 84.232589 doi "10.1109/84.232589".
- 84.232589 first "R.".
- 84.232589 isCitedBy Theres_Plenty_of_Room_at_the_Bottom.
- 84.232589 issue "1".
- 84.232589 journal "Journal of Microelectromechanical Systems".
- 84.232589 last "Feynman".
- 84.232589 pages "4–14".
- 84.232589 title "Infinitesimal machinery".
- 84.232589 volume "2".
- 84.232589 year "1993".