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- 5.704260 accessdate "2014-11-09".
- 5.704260 author2 "R.T. Howe".
- 5.704260 author3 "R.S. Muller".
- 5.704260 date "August 1998".
- 5.704260 doi "10.1109/5.704260".
- 5.704260 first "J.M.".
- 5.704260 first1 "J. M.".
- 5.704260 first1 "J.M.".
- 5.704260 first2 "R. T.".
- 5.704260 first2 "R.T.".
- 5.704260 first3 "R. S.".
- 5.704260 first3 "R.S.".
- 5.704260 isCitedBy Microelectromechanical_systems.
- 5.704260 isCitedBy Nanoelectromechanical_relay.
- 5.704260 isCitedBy Surface_micromachining.
- 5.704260 issue "8".
- 5.704260 journal Proceedings_of_the_IEEE.
- 5.704260 journal "Proceedings of the IEEE".
- 5.704260 last "Bustillo".
- 5.704260 last1 "Bustillo".
- 5.704260 last2 "Howe".
- 5.704260 last3 "Muller".
- 5.704260 pages "1552–1574".
- 5.704260 title "Surface Micromachining for Microelectromechanical Systems".
- 5.704260 title "Surface micromachining for microelectromechanical systems".
- 5.704260 url "http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=704260".
- 5.704260 url "http://www.ee.nthu.edu.tw/sclu/surface_micromachining.pdf".
- 5.704260 volume "86".