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- 5.704259 doi "10.1109/5.704259".
- 5.704259 first1 "G.T.A.".
- 5.704259 first2 "N.I.".
- 5.704259 first3 "K.E.".
- 5.704259 isCitedBy Microelectromechanical_systems.
- 5.704259 issue "8".
- 5.704259 journal "Proceedings of the IEEE".
- 5.704259 last1 "Kovacs".
- 5.704259 last2 "Maluf".
- 5.704259 last3 "Petersen".
- 5.704259 page "1536".
- 5.704259 title "Bulk micromachining of silicon".
- 5.704259 volume "86".
- 5.704259 year "1998".