Matches in DBpedia 2016-04 for { <http://doi.org/10.1088/0960-1317/5/2/015> ?p ?o }
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- 015 bibcode "1995JMiMi...5..115J".
- 015 doi "10.1088/0960-1317/5/2/015".
- 015 first1 "H".
- 015 first2 "M de".
- 015 first3 "R".
- 015 first4 "M".
- 015 isCitedBy Black_silicon.
- 015 issue "2".
- 015 journal "Journal of Micromechanics and Microengineering".
- 015 last1 "Jansen".
- 015 last2 "Boer".
- 015 last3 "Legtenberg".
- 015 last4 "Elwenspoek".
- 015 pages "115–120".
- 015 title "The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control".
- 015 volume "5".
- 015 year "1995".