Matches in DBpedia 2016-04 for { <http://doi.org/10.1063/1.326355> ?p ?o }
Showing triples 1 to 14 of
14
with 100 triples per page.
- 1.326355 date "1979-05-01".
- 1.326355 doi "10.1063/1.326355".
- 1.326355 first "J. W.".
- 1.326355 first2 "Harold F.".
- 1.326355 isCitedBy Plasma_etching.
- 1.326355 issn "0021-8979".
- 1.326355 issue "5".
- 1.326355 journal "Journal of Applied Physics".
- 1.326355 last "Coburn".
- 1.326355 last2 "Winters".
- 1.326355 pages "3189–3196".
- 1.326355 title "Ion‐ and electron‐assisted gas‐surface chemistry—An important effect in plasma etching".
- 1.326355 url "http://scitation.aip.org/content/aip/journal/jap/50/5/10.1063/1.326355".
- 1.326355 volume "50".