Matches in DBpedia 2016-04 for { <http://doi.org/10.1063/1.1940727> ?p ?o }
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- 1.1940727 date "2005-06-15".
- 1.1940727 doi "10.1063/1.1940727".
- 1.1940727 first "Riikka L.".
- 1.1940727 isCitedBy Atomic_layer_deposition.
- 1.1940727 issn "0021-8979".
- 1.1940727 issue "12".
- 1.1940727 journal "Journal of Applied Physics".
- 1.1940727 last "Puurunen".
- 1.1940727 pages "121301".
- 1.1940727 title "Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process".
- 1.1940727 url "http://scitation.aip.org/content/aip/journal/jap/97/12/10.1063/1.1940727".
- 1.1940727 volume "97".