Matches in DBpedia 2016-04 for { <http://doi.org/10.1021/cm001017j> ?p ?o }
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- cm001017j author1 "Kukli, K.".
- cm001017j author2 "Ritala, M.".
- cm001017j author3 "Leskelä, M.".
- cm001017j doi "10.1021/cm001017j".
- cm001017j isCitedBy Tantalum(V)_ethoxide.
- cm001017j issue "7".
- cm001017j journal Chem._Mater..
- cm001017j pages "1914–1920".
- cm001017j title "Atomic Layer Deposition and Chemical Vapor Deposition of Tantalum Oxide by Successive and Simultaneous Pulsing of Tantalum Ethoxide and Tantalum Chloride".
- cm001017j volume "12".
- cm001017j year "2000".