Matches in DBpedia 2016-04 for { <http://doi.org/10.1016/s0039-6028(96)01046-1> ?p ?o }
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- s0039-6028(96)01046-1 author "Weldon, M. K. and Marsico, V. E. and Chabal, Y. J. and Hamann, D. R. and Christman, S. B. and Chaban, E. E.".
- s0039-6028(96)01046-1 doi "10.1016/S0039-602801046-1".
- s0039-6028(96)01046-1 isCitedBy Bond_characterization.
- s0039-6028(96)01046-1 journal "Surface Science".
- s0039-6028(96)01046-1 number "1-3".
- s0039-6028(96)01046-1 pages "163–178".
- s0039-6028(96)01046-1 title "Infrared spectroscopy as a probe of fundamental processes in microelectronics: silicon wafer cleaning and bonding".
- s0039-6028(96)01046-1 volume "368".
- s0039-6028(96)01046-1 year "1996".