Matches in DBpedia 2016-04 for { <http://doi.org/10.1016/j.mee.2015.01.002> ?p ?o }
Showing triples 1 to 8 of
8
with 100 triples per page.
- j.mee.2015.01.002 author "Massimo Tormen; Enrico Sovernigo; Alessandro Pozzato; Michele Pianigiani; Maurizio Tormen".
- j.mee.2015.01.002 doi "10.1016/j.mee.2015.01.002".
- j.mee.2015.01.002 isCitedBy Nanoimprint_lithography.
- j.mee.2015.01.002 journal "Microelectronic Engineering".
- j.mee.2015.01.002 pages "21–26".
- j.mee.2015.01.002 title "Sub-100 μs nanoimprint lithography at wafer scale".
- j.mee.2015.01.002 volume "141".
- j.mee.2015.01.002 year "2015".