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- bf00463495 author "Becker, E. W.".
- bf00463495 doi "10.1007/BF00463495".
- bf00463495 first2 "W.".
- bf00463495 first3 "D.".
- bf00463495 first4 "H.".
- bf00463495 first5 "A.".
- bf00463495 first6 "S.".
- bf00463495 first7 "W.".
- bf00463495 first8 "H. J.".
- bf00463495 first9 "R.".
- bf00463495 isCitedBy LIGA.
- bf00463495 issue "11".
- bf00463495 journal "Naturwissenschaften".
- bf00463495 last2 "Ehrfeld".
- bf00463495 last3 "Münchmeyer".
- bf00463495 last4 "Betz".
- bf00463495 last5 "Heuberger".
- bf00463495 last6 "Pongratz".
- bf00463495 last7 "Glashauser".
- bf00463495 last8 "Michel".
- bf00463495 last9 "Siemens".
- bf00463495 pages "520–523".
- bf00463495 title "Production of Separation-Nozzle Systems for Uranium Enrichment by a Combination of X-Ray Lithography and Galvanoplastics".
- bf00463495 volume "69".
- bf00463495 year "1982".