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- Refractive_index_and_extinction_coefficient_of_thin_film_materials thumbnail Thin_Film_Analysis_Process.gif?width=300.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageID "43450635".
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- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageRevisionID "694310677".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Category:Light.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Category:Metrology.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Category:Refraction.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Category:Semiconductors.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Category:Thin_films.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Ellipsometry.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Fresnel_equations.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Hilbert_transform.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Indium_tin_oxide.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Kramers–Kronig_relations.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Microfabrication.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Photoresist.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Planck_constant.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Polarization_(waves).
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Reflectometry.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Refractive_index.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Rigorous_coupled-wave_analysis.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink Semiconductor_device_fabrication.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink File:OCD_Analysis_Flow_New.PNG.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLink File:Thin_Film_Analysis_Process.gif.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLinkText "''n'' as a function of ''E''".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLinkText "Forouhi Bloomer dispersion equations".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLinkText "Forouhi Bloomer model".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLinkText "Forouhi-Bloomer Dispersion relations for ''n'' and ''k''".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLinkText "Forouhi-Bloomer dispersion equations".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLinkText "Material and spectral properties".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLinkText "Refractive index and extinction coefficient of thin film materials".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLinkText "equation".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLinkText "reflectance, ''R'', or transmittance, ''T''".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLinkText "refractive index and extinction coefficient".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials wikiPageWikiLinkText "thickness (''t''), refractive index (''n'') and extinction coefficient (''k'')".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials alt "Complex Trench Structure Measured Rs and Rp".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials alt "Complex Trench Structure Schematic".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials alt "Optical Properties".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials alt "Reflectance".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials alt "k".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials alt "n".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials footer "Ex. 1: Amorphous materials typically exhibit one broad maximum in their n and k spectra. As a material transitions from the amorphous state to the fully crystalline state, the broad maximum sharpens up and other sharp peaks start to appear in the n and k spectra. This is demonstrated for the case of amorphous silicon progressing to poly-silicon and further progressing to crystalline silicon.".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials footer "Ex. 1: Reflectance spectra collected over 190nm-1000nm wavelength range for an amorphous silicon film on an oxidized silicon substrate plus the n and k spectra of the a-Si film. The film thickness was found to be 1147nm. The thicknesses of a-Si and SiO2 films, plus the n and k spectra of the a-Si were all simultaneously determined. The n and k spectra of the SiO2 film was held fixed.".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials footer "Ex. 2: Reflectance spectra collected over the 190nm-1000nm wavelength range for a photoresist film on silicon substrate, plus the n and k spectra of the photoresist. The film thickness was found to be 498nm. The thickness and the n and k spectra of the photoresist were all simultaneously determined.".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials footer "Ex. 3: Reflectance and transmittance spectra from 190nm - 1000nm for an uncoated glass substrate. Note that T = 0 for the glass substrate in the DUV, indicating absorption in this range of the spectrum. It is found that the value of k in the deep UV wavelength range is of the order of k = 3x10−4, and this small non-zero value is consistent with T = 0 in the deep UV.".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials footer "Ex. 3: Reflectance and transmittance spectra from 190nm - 1000nm of ITO deposited on the glass substrate described above, plus the n and k spectra of the ITO film. ITO thickness of 133nm and its n and k spectra were simultaneously determined by fitting measured reflectance and transmittance spectra to theoretical expressions of these quantities using the Forouhi-Bloomer equations.".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials footer "Ex. 4: Multi-spectral analysis was used to analyze the reflectance spectra of a Ge40Se60 film deposited on two different substrates: both silicon and oxidized-silicon substrates. The measurements yielded a single n and k spectra of Ge40Se60. A thickness of 33.6 nm for Ge40Se60 on the oxidized silicon substrate was found, while a thickness of 34.5 nm of Ge40Se60 on the silicon substrate was found. In addition the thickness of the oxide layer was determined to be 166nm.".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials footer "Ex. 5: Measured Rs and Rp reflectance collected on the Complex Trench Struture.".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials footer "Ex. 5: A trench structure consisting of various films and complex profile. The Poly-Si film was measured on a blanket area of the sample and its n and k spectra were determined based on the Forouhi-Bloomer Dispersion Equations. A fixed table of values for the n and k spectra of the SiO2 and Si3N4 films was utilized. With the n and k spectra of these films at hand, and utilizing Rigorous Coupled Wave Analysis , film thicknesses, various depths inside the trench, and CDs are then determined.".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials image "248".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials image "Comparison_of_k.png".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials image "Comparison_of_n.png".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials image "Complex Trench Structure Measured Rs and Rp.png".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials image "Complex_Trench_Structure_Image.png".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials image "Ex. 2 - Amorphous Silicon on Oxided RR.png".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials image "Ex. 2 - Amorphous Silicon on Oxided nk.png".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials image "Ex. 5 - 193nm Photoresist RR.png".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials image "Ex. 6 - Glass RRTT.png".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials image "Ex. 6 - Glass nk.png".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials image "Ex. 6 - ITO nk.png".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials image "Ex. 6 - ITO on Glass RRTT.png".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials image "Ex. 8 - Multi-Spectral Analysis of Ge40Se60 RR.png".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials image "Ex. 8 - Multi-Spectral Analysis of Ge40Se60 nk.png".
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- Refractive_index_and_extinction_coefficient_of_thin_film_materials subject Category:Light.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials subject Category:Metrology.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials subject Category:Refraction.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials subject Category:Semiconductors.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials subject Category:Thin_films.
- Refractive_index_and_extinction_coefficient_of_thin_film_materials label "Refractive index and extinction coefficient of thin film materials".
- Refractive_index_and_extinction_coefficient_of_thin_film_materials sameAs m.011v98wx.
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- Refractive_index_and_extinction_coefficient_of_thin_film_materials depiction Thin_Film_Analysis_Process.gif.
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