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- Plasma-activated_bonding abstract "Plasma-activated bonding is a derivative, directed to lower processing temperatures for direct bonding with hydrophilic surfaces. The main requirements for lowering temperatures of direct bonding are the use of materials melting at low temperatures and with different coefficients of thermal expansion (CTE).Surface activation prior to bonding has the typical advantage that no intermediate layer is needed and sufficiently high bonding energy is achieved after annealing at temperatures below 400 °C.".
- Plasma-activated_bonding wikiPageID "31336125".
- Plasma-activated_bonding wikiPageLength "12590".
- Plasma-activated_bonding wikiPageOutDegree "51".
- Plasma-activated_bonding wikiPageRevisionID "705600235".
- Plasma-activated_bonding wikiPageWikiLink Activation.
- Plasma-activated_bonding wikiPageWikiLink Ambient_pressure.
- Plasma-activated_bonding wikiPageWikiLink Annealing_(metallurgy).
- Plasma-activated_bonding wikiPageWikiLink Atmosphere.
- Plasma-activated_bonding wikiPageWikiLink Atmospheric_pressure.
- Plasma-activated_bonding wikiPageWikiLink Biasing.
- Plasma-activated_bonding wikiPageWikiLink Bond_characterization.
- Plasma-activated_bonding wikiPageWikiLink Bond_strength.
- Plasma-activated_bonding wikiPageWikiLink Bulk_cargo.
- Plasma-activated_bonding wikiPageWikiLink Category:Electronics_manufacturing.
- Plasma-activated_bonding wikiPageWikiLink Category:Packaging_(microfabrication).
- Plasma-activated_bonding wikiPageWikiLink Category:Semiconductor_technology.
- Plasma-activated_bonding wikiPageWikiLink Category:Wafer_bonding.
- Plasma-activated_bonding wikiPageWikiLink Chemical-mechanical_planarization.
- Plasma-activated_bonding wikiPageWikiLink Chuck_(engineering).
- Plasma-activated_bonding wikiPageWikiLink Contamination.
- Plasma-activated_bonding wikiPageWikiLink Corona_discharge.
- Plasma-activated_bonding wikiPageWikiLink Dielectric.
- Plasma-activated_bonding wikiPageWikiLink Dielectric_barrier_discharge.
- Plasma-activated_bonding wikiPageWikiLink Direct_bonding.
- Plasma-activated_bonding wikiPageWikiLink Electric_spark.
- Plasma-activated_bonding wikiPageWikiLink Electrode.
- Plasma-activated_bonding wikiPageWikiLink Electron.
- Plasma-activated_bonding wikiPageWikiLink Fracture_toughness.
- Plasma-activated_bonding wikiPageWikiLink Glass.
- Plasma-activated_bonding wikiPageWikiLink Ground_(electricity).
- Plasma-activated_bonding wikiPageWikiLink Hydrophile.
- Plasma-activated_bonding wikiPageWikiLink Indium_tin_oxide.
- Plasma-activated_bonding wikiPageWikiLink Inductively_coupled_plasma.
- Plasma-activated_bonding wikiPageWikiLink Ion.
- Plasma-activated_bonding wikiPageWikiLink Mass_diffusivity.
- Plasma-activated_bonding wikiPageWikiLink Microwave.
- Plasma-activated_bonding wikiPageWikiLink Nitrogen.
- Plasma-activated_bonding wikiPageWikiLink Oxygen.
- Plasma-activated_bonding wikiPageWikiLink Plasma_(physics).
- Plasma-activated_bonding wikiPageWikiLink Plasma_activation.
- Plasma-activated_bonding wikiPageWikiLink Plasma_torch.
- Plasma-activated_bonding wikiPageWikiLink Radical_(chemistry).
- Plasma-activated_bonding wikiPageWikiLink Reactive-ion_etching.
- Plasma-activated_bonding wikiPageWikiLink Remote_plasma.
- Plasma-activated_bonding wikiPageWikiLink Temperature.
- Plasma-activated_bonding wikiPageWikiLink Thermal_expansion.
- Plasma-activated_bonding wikiPageWikiLink Vacuum.
- Plasma-activated_bonding wikiPageWikiLink Voltage.
- Plasma-activated_bonding wikiPageWikiLink Wafer_(electronics).
- Plasma-activated_bonding wikiPageWikiLink File:B-pab-dielectricbarrierdischarge.png.
- Plasma-activated_bonding wikiPageWikiLink File:B-pab-plasmareactorlpplasmaactivation.png.
- Plasma-activated_bonding wikiPageWikiLink File:B-pab-remoteplasmasystem.png.
- Plasma-activated_bonding wikiPageWikiLinkText "Plasma-activated bonding".
- Plasma-activated_bonding wikiPageWikiLinkText "surface activation".
- Plasma-activated_bonding wikiPageUsesTemplate Template:Clear.
- Plasma-activated_bonding wikiPageUsesTemplate Template:Wafer_bonding.
- Plasma-activated_bonding subject Category:Electronics_manufacturing.
- Plasma-activated_bonding subject Category:Packaging_(microfabrication).
- Plasma-activated_bonding subject Category:Semiconductor_technology.
- Plasma-activated_bonding subject Category:Wafer_bonding.
- Plasma-activated_bonding hypernym Derivative.
- Plasma-activated_bonding type ChemicalSubstance.
- Plasma-activated_bonding comment "Plasma-activated bonding is a derivative, directed to lower processing temperatures for direct bonding with hydrophilic surfaces.".
- Plasma-activated_bonding label "Plasma-activated bonding".
- Plasma-activated_bonding sameAs Q7201760.
- Plasma-activated_bonding sameAs m.0gkz8n4.
- Plasma-activated_bonding sameAs Q7201760.
- Plasma-activated_bonding wasDerivedFrom Plasma-activated_bonding?oldid=705600235.
- Plasma-activated_bonding isPrimaryTopicOf Plasma-activated_bonding.
