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- Planar_process abstract "The planar process is a manufacturing process used in the semiconductor industry to build individual components of a transistor, and in turn, connect those transistors together. It is the primary process by which modern integrated circuits are built. The process was developed by Jean Hoerni, one of the \"traitorous eight\", while working at Fairchild Semiconductor.The key concept was to view a circuit in its two-dimensional projection (a plane), thus allowing the use of photographic processing concepts such as film negatives to mask the projection of light exposed chemicals. This allowed the use of a series of exposures on a substrate (Silicon) to create silicon oxide (insulators) or doped regions (conductors). Together with the use of metallization (to join together the integrated circuits), and the concept of p–n junction isolation (from Kurt Lehovec), the researchers at Fairchild were able to create circuits on a single silicon crystal slice (a wafer) from a monocrystalline silicon boule.The process involves the basic procedures of silicon dioxide (SiO2) oxidation, SiO2 etching and heat diffusion. The final steps involves oxidizing the entire wafer with an SiO2 layer, etching contact vias to the transistors, and depositing a covering metal layer over the oxide, thus connecting the transistors without manually wiring them together.Early versions of the planar process used a photolithography process using ordinary visible light.As of 2011, small features are typically made with 193 nm \"deep\" UV lithography.Some researchers use even higher-energy extreme ultraviolet lithography".
- Planar_process wikiPageExternalLink timeline.html.
- Planar_process wikiPageExternalLink 1955-Photolithography.html.
- Planar_process wikiPageExternalLink 1958-Miniaturized.html.
- Planar_process wikiPageExternalLink 1959-invention-of-the-planar-manufacturing-process-24.html.
- Planar_process wikiPageExternalLink index.html.
- Planar_process wikiPageExternalLink planar.html.
- Planar_process wikiPageExternalLink 1955-Oxide.html.
- Planar_process wikiPageExternalLink 1956-Silicon.html.
- Planar_process wikiPageExternalLink index.html.
- Planar_process wikiPageID "1251985".
- Planar_process wikiPageLength "3738".
- Planar_process wikiPageOutDegree "15".
- Planar_process wikiPageRevisionID "698071548".
- Planar_process wikiPageWikiLink Category:Semiconductor_device_fabrication.
- Planar_process wikiPageWikiLink Extreme_ultraviolet_lithography.
- Planar_process wikiPageWikiLink Fairchild_Semiconductor.
- Planar_process wikiPageWikiLink Integrated_circuit.
- Planar_process wikiPageWikiLink Jean_Hoerni.
- Planar_process wikiPageWikiLink Kurt_Lehovec.
- Planar_process wikiPageWikiLink Photographic_processing.
- Planar_process wikiPageWikiLink Photolithography.
- Planar_process wikiPageWikiLink P–n_junction_isolation.
- Planar_process wikiPageWikiLink Semiconductor_device_fabrication.
- Planar_process wikiPageWikiLink Semiconductor_industry.
- Planar_process wikiPageWikiLink Silicon_dioxide.
- Planar_process wikiPageWikiLink Traitorous_eight.
- Planar_process wikiPageWikiLink Transistor.
- Planar_process wikiPageWikiLinkText "Planar Process".
- Planar_process wikiPageWikiLinkText "Planar manufacturing process".
- Planar_process wikiPageWikiLinkText "Planar process".
- Planar_process wikiPageWikiLinkText "planar fabrication techniques".
- Planar_process wikiPageWikiLinkText "planar process".
- Planar_process wikiPageWikiLinkText "planar technology".
- Planar_process wikiPageWikiLinkText "planar".
- Planar_process wikiPageWikiLinkText "silicon planar transistors".
- Planar_process wikiPageUsesTemplate Template:Cite_web.
- Planar_process wikiPageUsesTemplate Template:Reflist.
- Planar_process subject Category:Semiconductor_device_fabrication.
- Planar_process hypernym Process.
- Planar_process type Election.
- Planar_process type Process.
- Planar_process type Semiconductor.
- Planar_process comment "The planar process is a manufacturing process used in the semiconductor industry to build individual components of a transistor, and in turn, connect those transistors together. It is the primary process by which modern integrated circuits are built.".
- Planar_process label "Planar process".
- Planar_process sameAs Q1520588.
- Planar_process sameAs Planartechnik.
- Planar_process sameAs Processo_planare.
- Planar_process sameAs Планарлы-эпитаксиалдық_технология.
- Planar_process sameAs m.04m8wd.
- Planar_process sameAs Планарная_технология.
- Planar_process sameAs Планарна_технологія.
- Planar_process sameAs Q1520588.
- Planar_process wasDerivedFrom Planar_process?oldid=698071548.
- Planar_process isPrimaryTopicOf Planar_process.