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- Krypton_fluoride_laser abstract "A krypton fluoride laser (KrF laser) is a particular type of excimer laser, which is sometimes (more correctly) called an exciplex laser. With its 248 nanometer wavelength, it is a deep ultraviolet laser which is commonly used in the production of semiconductor integrated circuits, industrial micromachining, and scientific research. The term excimer is short for 'excited dimer', while exciplex is short for 'excited complex'. An excimer laser typically contains a mixture of: a noble gas such as argon, krypton, or xenon; and a halogen gas such as fluorine or chlorine; which under suitably intense conditions of electromagnetic stimulation and pressure, emits a beam of coherent stimulated radiation as laser light in the ultraviolet range.KrF and ArF excimer lasers are widely incorporated into high-resolution photolithography machines, one of the critical tools required for microelectronic chip manufacturing in nanometer dimensions. Excimer laser lithography has enabled transistor feature sizes to shrink from 800 nanometers in 1990 to below 45 nanometers in 2010.".
- Krypton_fluoride_laser wikiPageExternalLink lasercreation.htm.
- Krypton_fluoride_laser wikiPageExternalLink nike.html.
- Krypton_fluoride_laser wikiPageExternalLink fs_krf.htm.
- Krypton_fluoride_laser wikiPageID "2238022".
- Krypton_fluoride_laser wikiPageLength "6652".
- Krypton_fluoride_laser wikiPageOutDegree "44".
- Krypton_fluoride_laser wikiPageRevisionID "704222248".
- Krypton_fluoride_laser wikiPageWikiLink 800_nanometer.
- Krypton_fluoride_laser wikiPageWikiLink Argon_fluoride_laser.
- Krypton_fluoride_laser wikiPageWikiLink Carcinogen.
- Krypton_fluoride_laser wikiPageWikiLink Category:Excimer_lasers.
- Krypton_fluoride_laser wikiPageWikiLink Category:Fluorine.
- Krypton_fluoride_laser wikiPageWikiLink Category:Krypton.
- Krypton_fluoride_laser wikiPageWikiLink Category:Krypton_compounds.
- Krypton_fluoride_laser wikiPageWikiLink Coordination_complex.
- Krypton_fluoride_laser wikiPageWikiLink Excimer.
- Krypton_fluoride_laser wikiPageWikiLink Excimer_laser.
- Krypton_fluoride_laser wikiPageWikiLink Fluorine.
- Krypton_fluoride_laser wikiPageWikiLink Integrated_circuit.
- Krypton_fluoride_laser wikiPageWikiLink Joule.
- Krypton_fluoride_laser wikiPageWikiLink Krypton.
- Krypton_fluoride_laser wikiPageWikiLink Krypton_difluoride.
- Krypton_fluoride_laser wikiPageWikiLink Laser.
- Krypton_fluoride_laser wikiPageWikiLink Lipid.
- Krypton_fluoride_laser wikiPageWikiLink Los_Alamos_National_Laboratory.
- Krypton_fluoride_laser wikiPageWikiLink Microelectronics.
- Krypton_fluoride_laser wikiPageWikiLink Moores_law.
- Krypton_fluoride_laser wikiPageWikiLink Nanosecond.
- Krypton_fluoride_laser wikiPageWikiLink Nike_laser.
- Krypton_fluoride_laser wikiPageWikiLink Nuclear_fusion.
- Krypton_fluoride_laser wikiPageWikiLink Nucleic_acid.
- Krypton_fluoride_laser wikiPageWikiLink Photolithography.
- Krypton_fluoride_laser wikiPageWikiLink Plasma_(physics).
- Krypton_fluoride_laser wikiPageWikiLink Protein.
- Krypton_fluoride_laser wikiPageWikiLink Repulsive_state.
- Krypton_fluoride_laser wikiPageWikiLink Spectrum.
- Krypton_fluoride_laser wikiPageWikiLink UV_laser.
- Krypton_fluoride_laser wikiPageWikiLink Ultraviolet.
- Krypton_fluoride_laser wikiPageWikiLink United_States_Naval_Research_Laboratory.
- Krypton_fluoride_laser wikiPageWikiLinkText "KrF".
- Krypton_fluoride_laser wikiPageWikiLinkText "Krypton fluoride laser".
- Krypton_fluoride_laser wikiPageWikiLinkText "Krypton".
- Krypton_fluoride_laser wikiPageWikiLinkText "krypton fluoride laser".
- Krypton_fluoride_laser wikiPageWikiLinkText "krypton fluoride".
- Krypton_fluoride_laser wikiPageWikiLinkText "krypton-fluoride".
- Krypton_fluoride_laser wikiPageUsesTemplate Template:Chem.
- Krypton_fluoride_laser wikiPageUsesTemplate Template:Excimer_lasers.
- Krypton_fluoride_laser wikiPageUsesTemplate Template:Reflist.
- Krypton_fluoride_laser subject Category:Excimer_lasers.
- Krypton_fluoride_laser subject Category:Fluorine.
- Krypton_fluoride_laser subject Category:Krypton.
- Krypton_fluoride_laser subject Category:Krypton_compounds.
- Krypton_fluoride_laser hypernym Type.
- Krypton_fluoride_laser type Type.
- Krypton_fluoride_laser type Element.
- Krypton_fluoride_laser type Laser.
- Krypton_fluoride_laser type Type.
- Krypton_fluoride_laser comment "A krypton fluoride laser (KrF laser) is a particular type of excimer laser, which is sometimes (more correctly) called an exciplex laser. With its 248 nanometer wavelength, it is a deep ultraviolet laser which is commonly used in the production of semiconductor integrated circuits, industrial micromachining, and scientific research. The term excimer is short for 'excited dimer', while exciplex is short for 'excited complex'.".
- Krypton_fluoride_laser label "Krypton fluoride laser".
- Krypton_fluoride_laser sameAs Q3028383.
- Krypton_fluoride_laser sameAs ليزر_فلوريد_الكريبتون.
- Krypton_fluoride_laser sameAs Láser_de_fluoruro_de_kriptón.
- Krypton_fluoride_laser sameAs Laser_à_fluorure_de_krypton.
- Krypton_fluoride_laser sameAs m.06y9nb.
- Krypton_fluoride_laser sameAs Q3028383.
- Krypton_fluoride_laser wasDerivedFrom Krypton_fluoride_laser?oldid=704222248.
- Krypton_fluoride_laser isPrimaryTopicOf Krypton_fluoride_laser.