Matches in DBpedia 2016-04 for { <http://dbpedia.org/resource/Immersion_lithography> ?p ?o }
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- Immersion_lithography abstract "Immersion lithography is a photolithography resolution enhancement technique for manufacturing integrated circuits (ICs) that replaces the usual air gap between the final lens and the wafer surface with a liquid medium that has a refractive index greater than one. The resolution is increased by a factor equal to the refractive index of the liquid. Current immersion lithography tools use highly purified water for this liquid, achieving feature sizes below 45 nanometers. ASML, Canon, and Nikon are currently the only manufacturers of immersion lithography systems.The idea for Immersion lithography was first proposed and realized in the 1980s.".
- Immersion_lithography thumbnail Immersion_lithography_illustration.svg?width=300.
- Immersion_lithography wikiPageID "642936".
- Immersion_lithography wikiPageLength "10264".
- Immersion_lithography wikiPageOutDegree "34".
- Immersion_lithography wikiPageRevisionID "681813691".
- Immersion_lithography wikiPageWikiLink 14_nanometer.
- Immersion_lithography wikiPageWikiLink 32_nanometer.
- Immersion_lithography wikiPageWikiLink 45_nanometer.
- Immersion_lithography wikiPageWikiLink 65_nanometer.
- Immersion_lithography wikiPageWikiLink ASML_Holding.
- Immersion_lithography wikiPageWikiLink Advanced_Micro_Devices.
- Immersion_lithography wikiPageWikiLink Angular_resolution.
- Immersion_lithography wikiPageWikiLink Canon_Inc..
- Immersion_lithography wikiPageWikiLink Category:Lithography_(microfabrication).
- Immersion_lithography wikiPageWikiLink Extreme_ultraviolet_lithography.
- Immersion_lithography wikiPageWikiLink IBM.
- Immersion_lithography wikiPageWikiLink Intel.
- Immersion_lithography wikiPageWikiLink Lutetium_aluminium_garnet.
- Immersion_lithography wikiPageWikiLink Multiple_patterning.
- Immersion_lithography wikiPageWikiLink Nikon.
- Immersion_lithography wikiPageWikiLink Numerical_aperture.
- Immersion_lithography wikiPageWikiLink Photolithography.
- Immersion_lithography wikiPageWikiLink Photoresist.
- Immersion_lithography wikiPageWikiLink Refractive_index.
- Immersion_lithography wikiPageWikiLink Solvated_electron.
- Immersion_lithography wikiPageWikiLink Texas_Instruments.
- Immersion_lithography wikiPageWikiLink Thermodynamics.
- Immersion_lithography wikiPageWikiLink Toshiba.
- Immersion_lithography wikiPageWikiLink Ultraviolet.
- Immersion_lithography wikiPageWikiLink United_Microelectronics_Corporation.
- Immersion_lithography wikiPageWikiLink File:56_nm_hp_polarized_image.PNG.
- Immersion_lithography wikiPageWikiLink File:Immersion_lithography_illustration.svg.
- Immersion_lithography wikiPageWikiLinkText "193 nm immersion".
- Immersion_lithography wikiPageWikiLinkText "Immersion Lithography".
- Immersion_lithography wikiPageWikiLinkText "Immersion lithography".
- Immersion_lithography wikiPageWikiLinkText "immersion lithography".
- Immersion_lithography wikiPageWikiLinkText "liquid immersion".
- Immersion_lithography wikiPageUsesTemplate Template:Lead_rewrite.
- Immersion_lithography wikiPageUsesTemplate Template:Multiple_issues.
- Immersion_lithography wikiPageUsesTemplate Template:Outdated.
- Immersion_lithography wikiPageUsesTemplate Template:Refimprove.
- Immersion_lithography subject Category:Lithography_(microfabrication).
- Immersion_lithography hypernym Technique.
- Immersion_lithography type TopicalConcept.
- Immersion_lithography type Process.
- Immersion_lithography comment "Immersion lithography is a photolithography resolution enhancement technique for manufacturing integrated circuits (ICs) that replaces the usual air gap between the final lens and the wafer surface with a liquid medium that has a refractive index greater than one. The resolution is increased by a factor equal to the refractive index of the liquid. Current immersion lithography tools use highly purified water for this liquid, achieving feature sizes below 45 nanometers.".
- Immersion_lithography label "Immersion lithography".
- Immersion_lithography sameAs Q1076175.
- Immersion_lithography sameAs Immersionslithografie.
- Immersion_lithography sameAs 액침_노광.
- Immersion_lithography sameAs Immersielithografie.
- Immersion_lithography sameAs m.02zws9.
- Immersion_lithography sameAs Иммерсионная_литография.
- Immersion_lithography sameAs Імерсія_(оптика).
- Immersion_lithography sameAs Q1076175.
- Immersion_lithography wasDerivedFrom Immersion_lithography?oldid=681813691.
- Immersion_lithography depiction Immersion_lithography_illustration.svg.
- Immersion_lithography isPrimaryTopicOf Immersion_lithography.