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- Electron-beam_lithography abstract "Electron-beam lithography (often abbreviated as e-beam lithography) is the practice of scanning a focused beam of electrons to draw custom shapes on a surface covered with an electron-sensitive film called a resist (\"exposing\"). The electron beam changes the solubility of the resist, enabling selective removal of either the exposed or non-exposed regions of the resist by immersing it in a solvent (\"developing\"). The purpose, as with photolithography, is to create very small structures in the resist that can subsequently be transferred to the substrate material, often by etching.The primary advantage of electron-beam lithography is that it can draw custom patterns (direct-write) with sub-10 nm resolution. This form of maskless lithography has high resolution and low throughput, limiting its usage to photomask fabrication, low-volume production of semiconductor devices, and research & development.".
- Electron-beam_lithography thumbnail EB_litograph.jpg?width=300.
- Electron-beam_lithography wikiPageID "1093768".
- Electron-beam_lithography wikiPageLength "30981".
- Electron-beam_lithography wikiPageOutDegree "49".
- Electron-beam_lithography wikiPageRevisionID "707430772".
- Electron-beam_lithography wikiPageWikiLink Backscatter.
- Electron-beam_lithography wikiPageWikiLink Category:Lithography_(microfabrication).
- Electron-beam_lithography wikiPageWikiLink Convolution.
- Electron-beam_lithography wikiPageWikiLink Cross_section_(physics).
- Electron-beam_lithography wikiPageWikiLink Electron.
- Electron-beam_lithography wikiPageWikiLink Electron_avalanche.
- Electron-beam_lithography wikiPageWikiLink Electron_beam_technology.
- Electron-beam_lithography wikiPageWikiLink Electron_microscope.
- Electron-beam_lithography wikiPageWikiLink Electronvolt.
- Electron-beam_lithography wikiPageWikiLink Extreme_ultraviolet_lithography.
- Electron-beam_lithography wikiPageWikiLink Field_electron_emission.
- Electron-beam_lithography wikiPageWikiLink File:Feature_stitching_across_fields.png.
- Electron-beam_lithography wikiPageWikiLink Hydrogen_silsesquioxane.
- Electron-beam_lithography wikiPageWikiLink Inelastic_scattering.
- Electron-beam_lithography wikiPageWikiLink Interference_lithography.
- Electron-beam_lithography wikiPageWikiLink Interferometry.
- Electron-beam_lithography wikiPageWikiLink Inverse_problem.
- Electron-beam_lithography wikiPageWikiLink Ion_beam_lithography.
- Electron-beam_lithography wikiPageWikiLink Ionization_energy.
- Electron-beam_lithography wikiPageWikiLink Lanthanum_hexaboride.
- Electron-beam_lithography wikiPageWikiLink Lens_flare.
- Electron-beam_lithography wikiPageWikiLink Maskless_lithography.
- Electron-beam_lithography wikiPageWikiLink Monte_Carlo_method.
- Electron-beam_lithography wikiPageWikiLink Optical_aberration.
- Electron-beam_lithography wikiPageWikiLink Photolithography.
- Electron-beam_lithography wikiPageWikiLink Photomask.
- Electron-beam_lithography wikiPageWikiLink Point_spread_function.
- Electron-beam_lithography wikiPageWikiLink Polaron.
- Electron-beam_lithography wikiPageWikiLink Proximity_effect_(electron_beam_lithography).
- Electron-beam_lithography wikiPageWikiLink Resist.
- Electron-beam_lithography wikiPageWikiLink SEMATECH.
- Electron-beam_lithography wikiPageWikiLink Scanning_tunneling_microscope.
- Electron-beam_lithography wikiPageWikiLink Secondary_electrons.
- Electron-beam_lithography wikiPageWikiLink Shot_noise.
- Electron-beam_lithography wikiPageWikiLink Space_charge.
- Electron-beam_lithography wikiPageWikiLink Thermionic_emission.
- Electron-beam_lithography wikiPageWikiLink Transmission_electron_microscopy.
- Electron-beam_lithography wikiPageWikiLink File:EB_litograph.jpg.
- Electron-beam_lithography wikiPageWikiLink File:Electron_Beam_scattering.svg.
- Electron-beam_lithography wikiPageWikiLink File:PMMA_Linewidth_vs_SPL_Dose.PNG.
- Electron-beam_lithography wikiPageWikiLinkText "Electron-beam lithography".
- Electron-beam_lithography wikiPageWikiLinkText "Multiple-electron beam approaches".
- Electron-beam_lithography wikiPageWikiLinkText "beam".
- Electron-beam_lithography wikiPageWikiLinkText "e-beam".
- Electron-beam_lithography wikiPageWikiLinkText "electron current".
- Electron-beam_lithography wikiPageWikiLinkText "electron-beam lithography".
- Electron-beam_lithography wikiPageUsesTemplate Template:Nanolith.
- Electron-beam_lithography wikiPageUsesTemplate Template:Reflist.
- Electron-beam_lithography subject Category:Lithography_(microfabrication).
- Electron-beam_lithography hypernym Practice.
- Electron-beam_lithography type Company.
- Electron-beam_lithography type Process.
- Electron-beam_lithography comment "Electron-beam lithography (often abbreviated as e-beam lithography) is the practice of scanning a focused beam of electrons to draw custom shapes on a surface covered with an electron-sensitive film called a resist (\"exposing\"). The electron beam changes the solubility of the resist, enabling selective removal of either the exposed or non-exposed regions of the resist by immersing it in a solvent (\"developing\").".
- Electron-beam_lithography label "Electron-beam lithography".
- Electron-beam_lithography sameAs Q256845.
- Electron-beam_lithography sameAs Elektronová_litografie.
- Electron-beam_lithography sameAs Elektronenstrahllithografie.
- Electron-beam_lithography sameAs Elektronkiirlitograafia.
- Electron-beam_lithography sameAs طرحنگار_الکترونی.
- Electron-beam_lithography sameAs Elektronisuihkulitografia.
- Electron-beam_lithography sameAs Lithographie_xc3xa0_faisceau_dxc3xa9lectrons.
- Electron-beam_lithography sameAs इलेक्ट्रॉन_किरण_अश्मलेखन.
- Electron-beam_lithography sameAs 電子線描画装置.
- Electron-beam_lithography sameAs Elektronolitografia.
- Electron-beam_lithography sameAs Litografia_por_feixe_de_elétrons.
- Electron-beam_lithography sameAs m.045fqw.
- Electron-beam_lithography sameAs Электронная_литография.
- Electron-beam_lithography sameAs Quang_khắc_chùm_điện_tử.
- Electron-beam_lithography sameAs Q256845.
- Electron-beam_lithography sameAs 电子束曝光.
- Electron-beam_lithography wasDerivedFrom Electron-beam_lithography?oldid=707430772.
- Electron-beam_lithography depiction EB_litograph.jpg.
- Electron-beam_lithography isPrimaryTopicOf Electron-beam_lithography.