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- Argon_fluoride_laser abstract "The argon fluoride laser (ArF laser) is a particular type of excimer laser, which is sometimes (more correctly) called an exciplex laser. With its 193 nanometer wavelength, it is a deep ultraviolet laser, which is commonly used in the production of semiconductor integrated circuits, eye surgery, micromachining, and scientific research. The term excimer is short for \"excited dimer\", while exciplex is short for \"excited complex\". An excimer laser typically uses a mixture of a noble gas (argon, krypton, or xenon) and a halogen gas (fluorine or chlorine), which under suitable conditions of electrical stimulation and high pressure, emits coherent stimulated radiation (laser light) in the ultraviolet range.ArF (and KrF) excimer lasers are widely used in high-resolution photolithography machines, one of the critical technologies required for microelectronic chip manufacturing. Excimer laser lithography has enabled transistor feature sizes to shrink from 800 nanometers in 1990 to 22 nanometers in 2012.".
- Argon_fluoride_laser wikiPageID "29293276".
- Argon_fluoride_laser wikiPageLength "6506".
- Argon_fluoride_laser wikiPageOutDegree "27".
- Argon_fluoride_laser wikiPageRevisionID "610686235".
- Argon_fluoride_laser wikiPageWikiLink 800_nanometer.
- Argon_fluoride_laser wikiPageWikiLink Argon.
- Argon_fluoride_laser wikiPageWikiLink Argon_monofluoride.
- Argon_fluoride_laser wikiPageWikiLink Carcinogen.
- Argon_fluoride_laser wikiPageWikiLink Category:Excimer_lasers.
- Argon_fluoride_laser wikiPageWikiLink Coordination_complex.
- Argon_fluoride_laser wikiPageWikiLink Electrolaser.
- Argon_fluoride_laser wikiPageWikiLink Electronvolt.
- Argon_fluoride_laser wikiPageWikiLink Excimer.
- Argon_fluoride_laser wikiPageWikiLink Excimer_laser.
- Argon_fluoride_laser wikiPageWikiLink Fluorine.
- Argon_fluoride_laser wikiPageWikiLink Fused_quartz.
- Argon_fluoride_laser wikiPageWikiLink Integrated_circuit.
- Argon_fluoride_laser wikiPageWikiLink Krypton_fluoride_laser.
- Argon_fluoride_laser wikiPageWikiLink Microelectronics.
- Argon_fluoride_laser wikiPageWikiLink Moores_law.
- Argon_fluoride_laser wikiPageWikiLink Nike_laser.
- Argon_fluoride_laser wikiPageWikiLink Photolithography.
- Argon_fluoride_laser wikiPageWikiLink Repulsive_state.
- Argon_fluoride_laser wikiPageWikiLink Spectrum.
- Argon_fluoride_laser wikiPageWikiLink Surface_micromachining.
- Argon_fluoride_laser wikiPageWikiLink Ultraviolet.
- Argon_fluoride_laser wikiPageWikiLinkText "ArF".
- Argon_fluoride_laser wikiPageWikiLinkText "Argon fluoride laser".
- Argon_fluoride_laser wikiPageWikiLinkText "argon fluoride laser".
- Argon_fluoride_laser wikiPageWikiLinkText "argon-fluoride".
- Argon_fluoride_laser wikiPageUsesTemplate Template:Chem.
- Argon_fluoride_laser wikiPageUsesTemplate Template:Reflist.
- Argon_fluoride_laser subject Category:Excimer_lasers.
- Argon_fluoride_laser hypernym Type.
- Argon_fluoride_laser type Type.
- Argon_fluoride_laser type Laser.
- Argon_fluoride_laser type Type.
- Argon_fluoride_laser comment "The argon fluoride laser (ArF laser) is a particular type of excimer laser, which is sometimes (more correctly) called an exciplex laser. With its 193 nanometer wavelength, it is a deep ultraviolet laser, which is commonly used in the production of semiconductor integrated circuits, eye surgery, micromachining, and scientific research. The term excimer is short for \"excited dimer\", while exciplex is short for \"excited complex\".".
- Argon_fluoride_laser label "Argon fluoride laser".
- Argon_fluoride_laser sameAs Q3218288.
- Argon_fluoride_laser sameAs Laser_xc3xa0_fluorure_dargon.
- Argon_fluoride_laser sameAs m.0ds80_f.
- Argon_fluoride_laser sameAs Q3218288.
- Argon_fluoride_laser wasDerivedFrom Argon_fluoride_laser?oldid=610686235.
- Argon_fluoride_laser isPrimaryTopicOf Argon_fluoride_laser.