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- 87d8326a597a274a7b33d76bbb76761eb5063a48173ba6462dcc60f866b79d4a author "J. Oshinowo, A. Riva, M Pittroff, T. Schwarze and R. Wieland".
- 87d8326a597a274a7b33d76bbb76761eb5063a48173ba6462dcc60f866b79d4a isCitedBy Nitrogen_trifluoride.
- 87d8326a597a274a7b33d76bbb76761eb5063a48173ba6462dcc60f866b79d4a issue "2".
- 87d8326a597a274a7b33d76bbb76761eb5063a48173ba6462dcc60f866b79d4a journal "Solid State Technology".
- 87d8326a597a274a7b33d76bbb76761eb5063a48173ba6462dcc60f866b79d4a pages "20–24".
- 87d8326a597a274a7b33d76bbb76761eb5063a48173ba6462dcc60f866b79d4a title "Etch performance of Ar/N2/F2 for CVD/ALD chamber clean".
- 87d8326a597a274a7b33d76bbb76761eb5063a48173ba6462dcc60f866b79d4a volume "52".
- 87d8326a597a274a7b33d76bbb76761eb5063a48173ba6462dcc60f866b79d4a year "2009".