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Matches in DBpedia 2015-10 for { <http://dbpedia.org/resource/Microfabrication> ?p ?o }

• Microfabrication abstract "Microfabrication is the process of fabrication of miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication". In the last two decades microelectromechanical systems (MEMS), microsystems (European usage), micromachines (Japanese terminology) and their subfields, microfluidics/lab-on-a-chip, optical MEMS (also called MOEMS), RF MEMS, PowerMEMS, BioMEMS and their extension into nanoscale (for example NEMS, for nano electro mechanical systems) have re-used, adapted or extended microfabrication methods. Flat-panel displays and solar cells are also using similar techniques.Miniaturization of various devices presents challenges in many areas of science and engineering: physics, chemistry, materials science, computer science, ultra-precision engineering, fabrication processes, and equipment design. It is also giving rise to various kinds of interdisciplinary research. The major concepts and principles of microfabrication are microlithography, doping, thin films, etching, bonding, and polishing.".
• Microfabrication thumbnail Siliconchip_by_shapeshifter.png?width=300.
• Microfabrication wikiPageExternalLink ?p=1156.
• Microfabrication wikiPageExternalLink get-event.pl?--001964-000007-mhome--SME-.
• Microfabrication wikiPageID "3238520".
• Microfabrication wikiPageLength "10555".
• Microfabrication wikiPageOutDegree "100".
• Microfabrication wikiPageRevisionID "680282290".
• Microfabrication wikiPageWikiLink 1_micrometre.
• Microfabrication wikiPageWikiLink 3D_microfabrication.
• Microfabrication wikiPageWikiLink AMLCD.
• Microfabrication wikiPageWikiLink APCVD.
• Microfabrication wikiPageWikiLink Active-matrix_liquid-crystal_display.
• Microfabrication wikiPageWikiLink Actuator.
• Microfabrication wikiPageWikiLink Actuators.
• Microfabrication wikiPageWikiLink Ammonia.
• Microfabrication wikiPageWikiLink Argon.
• Microfabrication wikiPageWikiLink Bacteria.
• Microfabrication wikiPageWikiLink Biosensor.
• Microfabrication wikiPageWikiLink Bowling.
• Microfabrication wikiPageWikiLink Bowling_alley.
• Microfabrication wikiPageWikiLink Category:Microtechnology.
• Microfabrication wikiPageWikiLink Category:Nanotechnology.
• Microfabrication wikiPageWikiLink Category:Semiconductor_device_fabrication.
• Microfabrication wikiPageWikiLink Cell_(biology).
• Microfabrication wikiPageWikiLink Chemical-mechanical_planarization.
• Microfabrication wikiPageWikiLink Chemical_vapor_deposition.
• Microfabrication wikiPageWikiLink Chemistry.
• Microfabrication wikiPageWikiLink Cleanroom.
• Microfabrication wikiPageWikiLink Computer_science.
• Microfabrication wikiPageWikiLink DRIE.
• Microfabrication wikiPageWikiLink Deep_reactive-ion_etching.
• Microfabrication wikiPageWikiLink Doping_(semiconductor).
• Microfabrication wikiPageWikiLink Dust.
• Microfabrication wikiPageWikiLink Electron_beam_PVD.
• Microfabrication wikiPageWikiLink Electroplating.
• Microfabrication wikiPageWikiLink Embossing_(manufacturing).
• Microfabrication wikiPageWikiLink Epitaxy.
• Microfabrication wikiPageWikiLink Etching.
• Microfabrication wikiPageWikiLink Etching_(microfabrication).
• Microfabrication wikiPageWikiLink Evaporation_(deposition).
• Microfabrication wikiPageWikiLink Evaporative_deposition.
• Microfabrication wikiPageWikiLink Flat_panel_display.
• Microfabrication wikiPageWikiLink Fuel_cell.
• Microfabrication wikiPageWikiLink History_of_physics.
• Microfabrication wikiPageWikiLink Humidity.
• Microfabrication wikiPageWikiLink Hydrogen.
• Microfabrication wikiPageWikiLink Hydrogen_chloride.
• Microfabrication wikiPageWikiLink IEEE.
• Microfabrication wikiPageWikiLink Ink_jet.
• Microfabrication wikiPageWikiLink Inkjet_printing.
• Microfabrication wikiPageWikiLink Institute_of_Electrical_and_Electronics_Engineers.
• Microfabrication wikiPageWikiLink Integrated_circuit.
• Microfabrication wikiPageWikiLink Integrated_circuits.
• Microfabrication wikiPageWikiLink Ion_implantation.
• Microfabrication wikiPageWikiLink Journal_of_Micromechanics_and_Microengineering.
• Microfabrication wikiPageWikiLink LPCVD.
• Microfabrication wikiPageWikiLink Lithography.
• Microfabrication wikiPageWikiLink MOEMS.
• Microfabrication wikiPageWikiLink Manufacturing.
• Microfabrication wikiPageWikiLink Materials_science.
• Microfabrication wikiPageWikiLink Micro-Opto-Electro-Mechanical_Systems.
• Microfabrication wikiPageWikiLink Microelectromechanical_systems.
• Microfabrication wikiPageWikiLink Microelectronics.
• Microfabrication wikiPageWikiLink Microfluidic_devices.
• Microfabrication wikiPageWikiLink Microfluidics.
• Microfabrication wikiPageWikiLink Microlithography.
• Microfabrication wikiPageWikiLink Micromachinery.
• Microfabrication wikiPageWikiLink Micrometre.
• Microfabrication wikiPageWikiLink Molecular_diffusion.
• Microfabrication wikiPageWikiLink Nanosensor.
• Microfabrication wikiPageWikiLink Optical_engineering.
• Microfabrication wikiPageWikiLink Oxidation.
• Microfabrication wikiPageWikiLink Oxygen.
• Microfabrication wikiPageWikiLink PECVD.
• Microfabrication wikiPageWikiLink Peroxide.
• Microfabrication wikiPageWikiLink Photolithography.
• Microfabrication wikiPageWikiLink Physical_vapor_deposition.
• Microfabrication wikiPageWikiLink Physics.
• Microfabrication wikiPageWikiLink Plasma-enhanced_chemical_vapor_deposition.
• Microfabrication wikiPageWikiLink Plasma_etching.
• Microfabrication wikiPageWikiLink Polishing.
• Microfabrication wikiPageWikiLink Polymer.
• Microfabrication wikiPageWikiLink PowerMEMS.
• Microfabrication wikiPageWikiLink RCA_clean.
• Microfabrication wikiPageWikiLink Reactive-ion_etching.
• Microfabrication wikiPageWikiLink Redox.
• Microfabrication wikiPageWikiLink Semiconductor_device_fabrication.
• Microfabrication wikiPageWikiLink Semiconductor_fabrication.
• Microfabrication wikiPageWikiLink Semiconductor_manufacturing.
• Microfabrication wikiPageWikiLink Sensor.
• Microfabrication wikiPageWikiLink Sensors.
• Microfabrication wikiPageWikiLink Silicon_wafer.
• Microfabrication wikiPageWikiLink Smoke.
• Microfabrication wikiPageWikiLink Solar_cell.
• Microfabrication wikiPageWikiLink Sputter_deposition.
• Microfabrication wikiPageWikiLink Stamping_(metalworking).
• Microfabrication wikiPageWikiLink Sulfuric_acid.
• Microfabrication wikiPageWikiLink Temperature.
• Microfabrication wikiPageWikiLink Thermal_oxidation.

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