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- Electrostatic–pneumatic_activation abstract "Electrostatic–pneumatic activation is an actuation method for shaping thin membranes for MEMS and MOEMS devices. This method benefits from operation at high speed and low power consumption. It can also cause large deflection on thin membranes. Electrostatic-pneumatic MEMS devices usually consist of two membranes with a sealed cavity in between. One membrane calling actuator deflects into cavity by electrostatic pressure to compress air and increase air pressure. Elevated pressure pushes the other membrane and cause dome shape. With direct electrostatic actuation on membrane, a concave shape is achieved.This method is used in MEMS deformable mirrors to create convex and concave mirrors. Electrostatic-pneumatic actuation can double maximum displacement of a thin membrane compared to only electrostatic actuated membrane.Moreover, mechanical advantage is possible by use of electrostatic-pneumatic actuation. Since the cavity is filled with air, mechanical amplification is lower than hydraulic machinery with a non-compressible fluid.".
- Electrostatic–pneumatic_activation wikiPageID "43021100".
- Electrostatic–pneumatic_activation wikiPageLength "3709".
- Electrostatic–pneumatic_activation wikiPageOutDegree "8".
- Electrostatic–pneumatic_activation wikiPageRevisionID "683897652".
- Electrostatic–pneumatic_activation wikiPageWikiLink Category:Microtechnology.
- Electrostatic–pneumatic_activation wikiPageWikiLink Category:Optics.
- Electrostatic–pneumatic_activation wikiPageWikiLink Deformable_mirror.
- Electrostatic–pneumatic_activation wikiPageWikiLink Fluid.
- Electrostatic–pneumatic_activation wikiPageWikiLink Hydraulic_machinery.
- Electrostatic–pneumatic_activation wikiPageWikiLink MEMS.
- Electrostatic–pneumatic_activation wikiPageWikiLink MOEMS.
- Electrostatic–pneumatic_activation wikiPageWikiLink Mechanical_advantage.
- Electrostatic–pneumatic_activation wikiPageWikiLink Micro-Opto-Electro-Mechanical_Systems.
- Electrostatic–pneumatic_activation wikiPageWikiLink Microelectromechanical_systems.
- Electrostatic–pneumatic_activation wikiPageWikiLinkText "Electrostatic–pneumatic activation".
- Electrostatic–pneumatic_activation hasPhotoCollection Electrostatic–pneumatic_activation.
- Electrostatic–pneumatic_activation wikiPageUsesTemplate Template:Reflist.
- Electrostatic–pneumatic_activation subject Category:Microtechnology.
- Electrostatic–pneumatic_activation subject Category:Optics.
- Electrostatic–pneumatic_activation comment "Electrostatic–pneumatic activation is an actuation method for shaping thin membranes for MEMS and MOEMS devices. This method benefits from operation at high speed and low power consumption. It can also cause large deflection on thin membranes. Electrostatic-pneumatic MEMS devices usually consist of two membranes with a sealed cavity in between. One membrane calling actuator deflects into cavity by electrostatic pressure to compress air and increase air pressure.".
- Electrostatic–pneumatic_activation label "Electrostatic–pneumatic activation".
- Electrostatic–pneumatic_activation wasDerivedFrom Electrostatic–pneumatic_activation?oldid=683897652.
- Electrostatic–pneumatic_activation isPrimaryTopicOf Electrostatic–pneumatic_activation.