DBpedia – Linked Data Fragments
DBpedia 2016-04
Query DBpedia 2016-04 by triple pattern
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Matches in DBpedia 2016-04 for
{ ?s ?p "Isotropic Etching of Silicon in Fluorine Gas for MEMS Micromachining" }
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026
title
"
Isotropic Etching of Silicon in Fluorine Gas for MEMS Micromachining
"
.