Matches in DBpedia 2016-04 for { ?s ?p "Etec Systems was an American producer of scanning electron microscopes, electron beam lithography tools, and laser beam lithography tools from 1970 until 2005. It was located in Hayward, California, and Hillsboro, Oregon."@en }
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- Etec_Systems,_Inc. abstract "Etec Systems was an American producer of scanning electron microscopes, electron beam lithography tools, and laser beam lithography tools from 1970 until 2005. It was located in Hayward, California, and Hillsboro, Oregon.".
- Q5402536 abstract "Etec Systems was an American producer of scanning electron microscopes, electron beam lithography tools, and laser beam lithography tools from 1970 until 2005. It was located in Hayward, California, and Hillsboro, Oregon.".
- Etec_Systems,_Inc. comment "Etec Systems was an American producer of scanning electron microscopes, electron beam lithography tools, and laser beam lithography tools from 1970 until 2005. It was located in Hayward, California, and Hillsboro, Oregon.".
- Q5402536 comment "Etec Systems was an American producer of scanning electron microscopes, electron beam lithography tools, and laser beam lithography tools from 1970 until 2005. It was located in Hayward, California, and Hillsboro, Oregon.".