Matches in DBpedia 2015-10 for { ?s ?p "Kenneth Radford Shoulders (1927 – June 7, 2013) was an experimental physicist and inventor. He is known for various work related to the field of energy and has also been credited as an early pioneer of electron beam lithography, which has become a key mask-making technology for modern microelectronics. He has additionally been attributed the title, ‘Father of Vacuum of Microelctronics’ and been known as a founder of microelectronic field emission devices."@en }
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- Kenneth_R._Shoulders abstract "Kenneth Radford Shoulders (1927 – June 7, 2013) was an experimental physicist and inventor. He is known for various work related to the field of energy and has also been credited as an early pioneer of electron beam lithography, which has become a key mask-making technology for modern microelectronics. He has additionally been attributed the title, ‘Father of Vacuum of Microelctronics’ and been known as a founder of microelectronic field emission devices.".
- Kenneth_R._Shoulders comment "Kenneth Radford Shoulders (1927 – June 7, 2013) was an experimental physicist and inventor. He is known for various work related to the field of energy and has also been credited as an early pioneer of electron beam lithography, which has become a key mask-making technology for modern microelectronics. He has additionally been attributed the title, ‘Father of Vacuum of Microelctronics’ and been known as a founder of microelectronic field emission devices.".