Matches in DBpedia 2016-04 for { <http://doi.org/10.1016/s0924-4247(03)00202-4> ?p ?o }
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- s0924-4247(03)00202-4 author "Oberhammer, J. and Niklaus, F. and Stemme, G.".
- s0924-4247(03)00202-4 doi "10.1016/S0924-424700202-4".
- s0924-4247(03)00202-4 isCitedBy Adhesive_bonding.
- s0924-4247(03)00202-4 journal "Sensors and Actuators A: Physical".
- s0924-4247(03)00202-4 number "3".
- s0924-4247(03)00202-4 pages "297–304".
- s0924-4247(03)00202-4 title "Selective wafer-level adhesive bonding with benzocyclobutene for fabrication of cavities".
- s0924-4247(03)00202-4 volume "105".
- s0924-4247(03)00202-4 year "2003".