Matches in DBpedia 2016-04 for { <http://doi.org/10.1016/s0169-4332(00)00328-7> ?p ?o }
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- s0169-4332(00)00328-7 date "2000-09-01".
- s0169-4332(00)00328-7 doi "10.1016/S0169-433200328-7".
- s0169-4332(00)00328-7 first "Christophe".
- s0169-4332(00)00328-7 first2 "Marie-Claude".
- s0169-4332(00)00328-7 first3 "Pierre-Yves".
- s0169-4332(00)00328-7 isCitedBy Plasma_etching.
- s0169-4332(00)00328-7 issue "1–4".
- s0169-4332(00)00328-7 journal "Applied Surface Science".
- s0169-4332(00)00328-7 last "Cardinaud".
- s0169-4332(00)00328-7 last2 "Peignon".
- s0169-4332(00)00328-7 last3 "Tessier".
- s0169-4332(00)00328-7 pages "72–83".
- s0169-4332(00)00328-7 series "Surface Science in Micro & Nanotechnology".
- s0169-4332(00)00328-7 title "Plasma etching: principles, mechanisms, application to micro- and nano-technologies".
- s0169-4332(00)00328-7 url "http://www.sciencedirect.com/science/article/pii/S0169433200003287".
- s0169-4332(00)00328-7 volume "164".